EV Group

EV Group | Semiconductor Manufacturing Equipment and Process Solutions for Wafer Bonding, Optical Lithography, Nanoimprint Lithography, Resist Processing and Metrology

EV Group (EVG) is a leading supplier of equipment and process solutions for the manufacture of semiconductors, microelectromechanical systems (MEMS), compound semiconductors, power devices and nanotechnology devices. Key products include wafer bonding, thin-wafer processing, lithography/nanoimprint lithography (NIL) and metrology equipment, as well as photoresist coaters, cleaners and inspection systems.